Document Type

Conference Paper

Rights

This item is available under a Creative Commons License for non-commercial use only

Disciplines

2. ENGINEERING AND TECHNOLOGY

Publication Details

2nd Irish Workshop on Simulation in Manufacturing, Services and Logistics, Dublin City University, Dublin, Ireland, pp 66 - 71.

Abstract

Scheduling of a semiconductor manufacturing facility is one of the most complex tasks encountered. Confronted with a high technology product market, semiconductor manufacturing is increasingly more dynamic and competitive in the introduction of new products in shorter time intervals. Simulation provides an effective decision support tool in scheduling of semiconductor manufacturing. Simulation model was developed as a risk assessment tool for one of the implant process area. The model examines the impact of production schedule on tool performance by testing different production scenarios. Production ramping, local buffer capacity, product sequence and product mix seem to be influential factors of the toolset performances.

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