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This paper outlines some aspects of process control in semiconductor manufacturing. Starting with an outline of the semiconductor manufacturing process, the contribution will discuss temperature control of the chemical vapour deposition stage and the control of the wafer etching process, based on the industrial experience of the first two authors. Subsequently, the authors draw the attention of the semiconductor manufacturing community to the potential of properly tuned PID controllers for the achievement of simple and high performance control solutions.
Relihan, Keelin and Geraghty, Shane and O'Dwyer, Aidan : Some aspects of process control in semiconductor manufacturing. Proceedings of IMC-24; the 24th International Manufacturing Conference, pp. 1097-1104, Waterford Institute of Technology, August, 2007.